High precision optical measurement of micro
displacement technology Review
****
(Key laboratory of optical fiber communication technology, Chong Qing 400065, China)
Abstract
The micro displacement measurement technology has been widely applied in the field of science and industrial technology. Compared with traditional measurement methods, optical measurement has various advantages, such as high sensitivity, strong electromagnetic interference resistance, corrosion resistance, explosion-proof, simple structure, small volume, light weight, etc. This paper introduces several kinds of high precision optical measurement of micro displacement method, including the laser triangulation method, the laser interferometry method, the grating ruler method, the fiber Bragg grating method, the X-ray interferometry method and the F-P interferometry method. Various micro displacement measuring principle and instrument system are analyzed and compared. The characteristics of various methods are summed up and the trend of optical method is summarized.
Keywords: micro displacement measurement, high accuracy, optical measurement, the
development trend