的反应速度，表征了一个化学反应的快慢程度，而且κ的大小取决于温度及反应物本性，与浓度无关。
因此，单晶硅中各晶面的腐蚀速率与温度之间的量化关系有：
R?e-Ea/KT
这与右图基本吻合结果基本吻合
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