--(小氮的流量为0ml/min)
Alarm limit setting for Gas *EXHAUST [6] at 15 % ( ?150 Pa ) Variable Command: No --(报警限制为炉管压强为150Pa) Wait for gas *EXHAUST [6] --(等待炉管内的压强) 04 HEATUP
--(加热)
Message HEAT UP [6]. Sonalert alarm No --(加热)
Time: 000:30:00 (hr:min:sec) Variable Command: No --(时间30分钟)
Gas N2 [1] at 6.5 [slm ] Variable Command: No --(N2的流量为6.5slm)
Gas O2-LOW [3] at 0 [sccm] Variable Command: No --(O2的流量为0)
Gas [*EXHAUST [6]] at [5] [Pa ] Variable Command: Yes --(炉管的压力为5Pa)
Gas N2 POCL3 [7] at 0 [sccm] Variable Command: No --(小N2的流量为0)
Digital out [],,,POCLOPEN[12] = OFF,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF Variable Command: Yes
--(数字输出量POCL打开状态为关闭，R2D连接为关闭，可用命令为是)
Alarm on digital in N2 PRESS[1] = ON,AIRPRESS[2] = ON,DOORCLSD[3] = ON,REAREXH[4] = ON,UPSPOWER[5] = ON,UPS LOW[6] = ON,TEMP SCR[7] = ON,OVERHEAT[8] = ON --(报警的内容为数字量N2的压力打开，空气压力打开，炉门关闭打开，UPS电源打开，UPS低电压打开，温度可控硅打开，过温开关打开)
Alarm limit setting for Gas *EXHAUST [6] at 0 % ( ?0 Pa ) Variable Command: No --(报警限制在炉管压力为0时)
Branch on digital input REAREXH [4] to step COOLDOWN. Sonalert alarm Yes --(酸排的输入数字量分支到COOLDOWN这步)
Branch on digital input UPSPOWER [5] to step COOLDOWN. Sonalert alarm Yes --(UPS电源的数字输入量分支到COOLDOWN这步)
Branch on digital input CUSTALRM [12] to step COOLDOWN. Sonalert alarm Yes --(CUSTALRM的数字输入量分支到COOLDOWN这步)
Branch on digital input HEATEXCH [13] to step COOLDOWN. Sonalert alarm Yes --(HEATEXCH数字输入量分支到COOLDOWN这步) Wait for temp 833 (癈) at load Zone --(等待第一区温度到达833℃) Abort recipe 01 --(Abort 程序为01) 05 PREPURGE
Message PREPURGE [9]. Sonalert alarm No
Time: [000:01:00] (hr:min:sec) Variable Command: Yes --(时间为1分钟)
Normal recipe 02 Zone1 835.0 癈 Slope 10.00 癈/min Zone2 835.0 癈 Slope 10.00 癈/min Zone3 835.0 癈 Slope 10.00 癈/min Zone4 835.0 癈 Slope 10.00 癈/min Zone5 835.0 癈 Slope 10.00 癈/min ,profile table A
--(温度存储在NR02, 第一区的温度为835℃，第二区的温度为835℃，第三区的温度为835℃，第四区的温度为835℃，第五区的温度为835℃,拉温的数据存储在Table A中) Gas [N2 [1]] at [6.5] [slm ] Variable Command: Yes --(N2量为6.5slm)
Gas [O2-LOW [3]] at [150] [sccm] Variable Command: Yes --(O2量为150sccm)
Gas [N2 POCL3 [7]] at [600] [sccm] Variable Command: Yes --(小N2量为600sccm)
Alarm limit for analog input N2ACTEXH 6 at 15.0 slm at 45 % (?13.5) --(报警限制为模拟输入量补偿氮小于15*45%)
Branch on digital input REAREXH [4] to step COOLDOWN. Sonalert alarm Yes --(酸排的输入数字量分支到COOLDOWN这步)
Branch on digital input UPSPOWER [5] to step COOLDOWN. Sonalert alarm Yes --(UPS电源的数字输入量分支到COOLDOWN这步)
Branch on digital input CUSTALRM [12] to step COOLDOWN. Sonalert alarm Yes --(CUSTALRM的数字输入量分支到COOLDOWN这步)
Branch on digital input HEATEXCH [13] to step COOLDOWN. Sonalert alarm Yes --(HEATEXCH数字输入量分支到COOLDOWN这步) 06 POCL3 DEP
Message DEPOSITION [13]. Sonalert alarm No
Time: [000:30:00] (hr:min:sec) Variable Command: Yes
--(这步的时间为30分钟)
Digital out ,,,POCLOPEN[12] = ON,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF Variable Command: No
--(数字量的输出为POCLOPEN[12] = ON,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF)
Alarm limit setting for Gas N2 [1] at 5 % ( ?1.5 slm ) Variable Command: No --(报警限制为N2量的5%)
Alarm limit setting for Gas O2-LOW [3] at 5 % ( ?50 sccm) Variable Command: No --(报警限制为O2量的5%)
Alarm limit setting for Gas *EXHAUST [6] at 5 % ( ?50 Pa ) Variable Command: No --(报警限制在炉管压力的5%时)
Alarm limit setting for Gas N2 POCL3 [7] at 5 % ( ?50 sccm) Variable Command: No --(报警限制为小氮量的5%)
Branch on gas/pressure O2-LOW [3] to step POSTPURGE. Sonalert alarm Yes --(O2的压强分流到POSTPURGE这步)
Branch on gas/pressure *EXHAUST [6] to step POSTPURGE. Sonalert alarm Yes --(炉管的压强分流到POSTPURGE这步)
Branch on analog input N2ACTEXH 6 to step POSTPURGE. Sonalert alarm Yes --(O2的压强分流到POSTPURGE这步)
Branch on digital input REAREXH [4] to step CRITICAL STOP. Sonalert alarm Yes --(酸排的数字量输入分流到POSTPURGE这步)
Branch on digital input UPSPOWER [5] to step POSTPURGE. Sonalert alarm Yes --(UPS电源的数字量输入分流到POSTPURGE这步)
Branch on digital input CUSTALRM [12] to step POSTPURGE. Sonalert alarm Yes --(CUSTALRM的数字量输入分流到POSTPURGE这步)
Branch on digital input HEATEXCH [13] to step POSTPURGE. Sonalert alarm Yes --(HEATEXCH的数字量输入分流到POSTPURGE这步) 07 POSTPURGE
Message POSTPURGE [11]. Sonalert alarm No
Time: 000:05:00 (hr:min:sec) Variable Command: No --(这步的时间为5分钟)
Gas *EXHAUST [6] at -10 [Pa ] Variable Command: No --(炉管内的压强为-10Pa)
Digital out ,,,POCLOPEN[12] = OFF,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF Variable Command: No
--(数字量输出为POCLOPEN[12] = OFF,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF)
Alarm Limit Setting for All Analog Output Channel at 0 %
--(报警的设置为所有的模拟量在0%)
Alarm limit for analog input N2ACTEXH 6 at 15.0 slm at 0 % (?0.0) --(报警的设置为模拟量补偿氮为0%时)
Branch on digital input UPS LOW [6] to step CRITICAL STOP. Sonalert alarm Yes --(数字量输入UPS LOW分流到CRITICAL STOP) 08 COOLDOWN
--(降温)
Message COOLDOWN [7]. Sonalert alarm No
Time: 000:30:00 (hr:min:sec) Variable Command: No --(时间为30分钟)
Normal recipe 00 Zone1 800.0 癈 Slope 10.00 癈/min Zone2 800.0 癈 Slope 10.00 癈/min Zone3 800.0癈 Slope 10.00 癈/min Zone4 800.0 癈 Slope 10.00 癈/min Zone5 800.0 癈 Slope 10.00 癈/min ,profile table A --(温度存储在NR00, 第一区的温度为800℃，第二区的温度为800℃，第三区的温度为800℃，第四区的温度为800℃，第五区的温度为800℃,拉温的数据存储在Table A中) Gas N2 [1] at 7.5 [slm ] Variable Command: No --(N2为7.5slm)
Gas O2-LOW [3] at 0 [sccm] Variable Command: No --(O2为0)
Gas N2 POCL3 [7] at 20 [sccm] Variable Command: No
--(小氮量为20sccm)
Digital out ,,,POCLOPEN[12] = OFF,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF Variable Command: No
--(数字量输出为POCLOPEN[12] = OFF,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF)
Alarm Limit Setting for All Analog Output Channel at 0 %
--(报警设置为所有模拟量为0%)
Alarm limit for analog input N2ACTEXH 6 at 15.0 slm at 0 % (?0.0) --(报警的设置为模拟量补偿氮为0%时)
Branch on digital input UPS LOW [6] to step CRITICAL STOP. Sonalert alarm Yes --(数字量输入UPS LOW分流到CRITICAL STOP) Wait for temp 810 (癈) at centre Zn --(等待第三区的温度为810度) 09 PADDLE IN
--(浆进)
Message BOAT IN [2]. Sonalert alarm No --(舟进)
Time: 000:08:00 (hr:min:sec) Variable Command: No --(时间为8分钟)
Boat to 2600.0 mm at 600.0 mm/min with oscillation speed of 0.0 mm/min. Variable Command: No
--(舟在低位速度为600mm/min进入到2600这个位置) Gas N2 [1] at 2.0 [slm ] Variable Command: No --(N2量为2.0slm)
Gas *EXHAUST [6] at -25 [Pa ] Variable Command: No --(炉管内的压力为-25Pa)
Gas N2 POCL3 [7] at 0 [sccm] Variable Command: No --(小氮量为0sccm)
Digital out ,,,POCLOPEN[12] = OFF,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF Variable Command: No --(数字输出为POCLOPEN[12] = OFF,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF)
Alarm Limit Setting for All Analog Output Channel at 0 % --(报警设置为所有的模拟量输出为0%)
Alarm limit for analog input N2ACTEXH 6 at 15.0 slm at 0 % (?0.0)
--(报警的设置为模拟量补偿氮为0%时)
Alarm on digital in N2 PRESS[1] = ON,AIRPRESS[2] = ON,DOORCLSD[3] = OFF,REAREXH[4] = ON,UPSPOWER[5] = ON,UPS
LOW[6] = ON,TEMP SCR[7] = ON,OVERHEAT[8] = ON
--(报警为数字量输入N2压力为打开，空气压力为打开，炉门为关闭，酸排为打开，UPS电源为打开，UPS低电压为打开，SCR温度为打开，过温度为打开) Wait for boat to reach setpoint
--(等待舟到达指定位置)
Branch on boat alarm to step BOAT RETURN DOWN. Sonalert alarm Yes --(舟报警分流到BOAT RETURN DOWN这步) Abort recipe 02 --(Abort 程序为02) 10 LOAD OUT
--(载出)
Message BOAT OUT [3]. Sonalert alarm No
--(舟出)
Time: 000:08:00 (hr:min:sec) Variable Command: No --(时间为8分钟)
Boat to 10.0 mm at 600.0 mm/min with oscillation speed of 10.0 mm/min. Variable Command: No
--(舟为高位速度为600.0 mm/min到达home位置) Wait for boat to reach setpoint --(等待舟回到设置点)
Branch on boat alarm to step BOAT RETURN UP. Sonalert alarm Yes --(舟报警分流到BOAT RETURN UP这步) Abort recipe 03 --(Abort 程序为03) 11 RETURN
--(返回)
Branch always to step LOAD/UNLOAD. Sonalert alarm No --(通常分流到LOAD/UNLOAD这步) 12 CRITICAL STOP
--(急停)
Message STANDBY [1]. Sonalert alarm No --(准备)
Normal recipe 00 Zone1 800.0 癈 Slope 10.00 癈/min Zone2 800.0 癈
Slope 10.00 癈/min Zone3 800.0癈 Slope 10.00 癈/min Zone4 800.0 癈 Slope 10.00 癈/min Zone5 800.0 癈 Slope 10.00 癈/min ,profile table A --(温度存储在NR00, 第一区的温度为800℃，第二区的温度为800℃，第三区的温度为800℃，第四区的温度为800℃，第五区的温度为800℃，拉温的数据存储在Table A中) Boat to 10.0 mm at 600.0 mm/min with oscillation speed of 10.0 mm/min. Variable Command: No
--(舟在高位速度为600mm/min回到home位置) Gas N2 [1] at 0.0 [slm ] Variable Command: No --(N2量为0)
Gas O2-LOW [3] at 0 [sccm] Variable Command: No --(O2量为0)
Gas *EXHAUST [6] at -200 [Pa ] Variable Command: No --(炉管内-200Pa)
Gas N2 POCL3 [7] at 0 [sccm] Variable Command: No --(小氮量为0)
Gas TMPPOCL3 [8] at 20.0 [degr] Variable Command: No --(POCL3的温度为20℃)
Digital out ,,,POCLOPEN[12] = OFF,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF Variable Command: No
--(数字量输出为POCLOPEN[12] = OFF,,*FINNORM[14] = OFF,*FINABNO[15] = OFF,*RDY2LD[16] = OFF)
Alarm Limit Setting for All Analog Output Channel at 0 %